Tae‐Eog Lee

About

Tae‐Eog Lee is a distinguished researcher whose work has fundamentally shaped the field of semiconductor manufacturing automation, with a particular focus on cluster tool scheduling and Petri net-based modeling. His research addresses the complex operational challenges of cluster tools — automated production systems combining multiple single-wafer processing chambers with robotic wafer handlers — which are critical to modern wafer fabrication processes including chemical vapor deposition, etching, and atomic layer deposition. Lee's most influential contributions include pioneering scheduling analyses for both single- and dual-armed cluster tools, developing rigorous methods to handle strict timing constraints that, if violated, can compromise wafer quality. His 2003 paper on time-constrained dual-armed cluster tools alone has garnered 275 citations, reflecting its foundational importance. He further advanced the field by introducing negative event graphs to model time window constraints and developing efficient mixed-integer programming models grounded in timed Petri net theory. Beyond cyclic scheduling, Lee tackled emerging industrial challenges such as reentrant wafer flows, small-lot processing, and concurrent multi-wafer-type scheduling. His comprehensive 2008 review of cluster tool scheduling theory has become an essential reference for researchers entering the field. Collectively, his body of work demonstrates sustained, high-impact contributions spanning over a decade of semiconductor manufacturing research.

Research Focus

Key Achievements

Top Papers

1. 1
   Scheduling analysis of time-constrained dual-armed cluster tools

   275 citations · 2003
2. 2
   An Extended Event Graph With Negative Places and Tokens for Time Window Constraints

   150 citations · 2005
3. 3
   Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows

   131 citations · 2006
4. 4
   A review of scheduling theory and methods for semiconductor manufacturing cluster tools

   123 citations · 2008
5. 5
   An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems

   117 citations · 2011
6. 6
   Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

   109 citations · 2012
7. 7
   Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

   100 citations · 2014
8. 8
   A review of scheduling theory and methods for semiconductor manufacturing cluster tools

   97 citations · 2008
9. 9
   Modeling and implementing a real-time scheduler for dual-armed cluster tools

   97 citations · 2001
10. 10
    Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

    73 citations · 2014

Key Collaborators

Contact & Links