Ja-Hee Kim

Korea Advanced Institute of Science and Technology, Seoul National University

Papers

Total Citations

410

H-Index

About

Ja-Hee Kim is a leading authority in the modeling, scheduling, and real-time control of cluster tools for semiconductor manufacturing. Her research focuses on the critical challenge of managing time-constrained wafer fabrication processes, particularly for techniques like low-pressure chemical vapor deposition that demand strict timing windows. Kim’s seminal 2003 paper on scheduling analysis for dual-armed cluster tools has garnered 275 citations, establishing the foundational framework for ensuring that wafer processing steps meet their deadlines. She further advanced the field by developing and implementing real-time schedulers (2001, 97 citations) and pioneering methods for schedule stabilization and robust timing control (2004, 36 citations). Her work demonstrates that stable, repeating schedules are essential for both productivity and process integrity in cyclic manufacturing systems. By addressing the complexities of robot coordination and wafer residency constraints, Kim has provided practical solutions that directly impact yield and throughput in modern fabs. Her contributions are indispensable for engineers and researchers working to optimize the performance of automated, time-critical cluster tools.