Hwan-Yong Lee

Korea Advanced Institute of Science and Technology

Papers

Total Citations

417

H-Index

About

Hwan-Yong Lee is a leading authority in semiconductor manufacturing automation, with a career focused on the scheduling and control of complex, time-constrained equipment. His foundational work on **cluster tools**—the multi-chamber, robot-driven systems central to wafer fabrication—has defined the field. Lee’s seminal 2003 paper, “Scheduling analysis of time-constrained dual-armed cluster tools,” which has garnered **275 citations**, provided the first rigorous framework for ensuring that time-critical processes, such as low-pressure chemical vapor deposition, complete without violating strict timing windows. This work, alongside his earlier 2001 paper on real-time scheduler implementation (**97 citations**), established the theoretical and practical basis for maximizing throughput in dual-armed tools. Lee further extended his impact to **wet stations**, where he solved the complex problem of coordinating multiple wafer types, processing sequences, and robots to prevent collisions and deadlocks, as detailed in his 2007 paper (**45 citations**). His contributions are not merely academic; they are directly applied in high-volume fabs to boost yield and equipment efficiency, making him a pivotal figure in the advancement of smart manufacturing for the semiconductor industry.