Semiconductor device fabrication

Scheduling analysis of time-constrained dual-armed cluster tools

Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee, D.-J. Park

Citations: 275 • 2003

Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

Nai Qi Wu, MengChu Zhou

Citations: 209 • 2012

An Extended Event Graph With Negative Places and Tokens for Time Window Constraints

Tae‐Eog Lee, Sanghoo Park

Citations: 150 • 2005

Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows

Hyunjae Lee, Tae‐Eog Lee

Citations: 131 • 2006

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu

Citations: 123 • 2017

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Tae‐Eog Lee

Citations: 123 • 2008

Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

Hyun-Jung Kim, Jun-Ho Lee, Chihyun Jung, Tae‐Eog Lee

Citations: 109 • 2012

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Tae‐Eog Lee

Citations: 97 • 2008

Modeling and performance analysis of cluster tools using Petri nets

Raghunathan Srinivasan

Citations: 89 • 1998

Bayesian inference for mining semiconductor manufacturing big data for yield enhancement and smart production to empower industry 4.0

Marzieh Khakifirooz, Chen–Fu Chien, Ying‐Jen Chen

Citations: 87 • 2017

A Novel Method Based on Deep Convolutional Neural Networks for Wafer Semiconductor Surface Defect Inspection

Guojun Wen, Zhijun Gao, Qi Cai, Yudan Wang, Shuang Mei

Citations: 85 • 2020

Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

QingHua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou

Citations: 80 • 2013

A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility

Gerald T. Mackulak, Paul Savory

Citations: 71 • 2001

Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Single-Armed Cluster Tools Using Pareto-Optimal Optimization

Uno Wikborg, Tae‐Eog Lee

Citations: 68 • 2012

Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

QingHua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou

Citations: 66 • 2014

Feedback Control of Cluster Tools for Regulating Wafer Delays

Chulhan Kim, Tae‐Eog Lee

Citations: 60 • 2015

Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations

Tae-Sun Yu, Tae‐Eog Lee

Citations: 59 • 2017

Throughput optimization in dual-gripper interval robotic cells

Milind Dawande, H. Neil Geismar, Michael Pinedo, Chelliah Sriskandarajah

Citations: 53 • 2009

Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

Jipeng Wang, Hesuan Hu, Chunrong Pan, Yuan Zhou, Liang Li

Citations: 51 • 2020

Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

Tae‐Eog Lee, Hwan-Yong Lee, Sangjin Lee

Citations: 45 • 2007