Wafer fabrication

Scheduling analysis of time-constrained dual-armed cluster tools

Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee, D.-J. Park

Citations: 275 • 2003

A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Naiqi Wu, Chengbin Chu, Feng Chu, Meng Zhou

Citations: 230 • 2008

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu

Citations: 123 • 2017

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Tae‐Eog Lee

Citations: 123 • 2008

Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

QingHua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu

Citations: 112 • 2016

Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

Hyun-Jung Kim, Jun-Ho Lee, Chihyun Jung, Tae‐Eog Lee

Citations: 109 • 2012

Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

Hyun-Jung Kim, Jun-Ho Lee, Tae‐Eog Lee

Citations: 100 • 2014

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Tae‐Eog Lee

Citations: 97 • 2008

Modeling and implementing a real-time scheduler for dual-armed cluster tools

Yong-Ho Shin, Tae‐Eog Lee, Ja-Hee Kim, Hwan-Yong Lee

Citations: 97 • 2001

Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

Yan Qiao, Naiqi Wu, Fajun Yang, MengChu Zhou, QingHua Zhu

Citations: 83 • 2016

Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

Jun-Ho Lee, Hyun-Jung Kim, Tae‐Eog Lee

Citations: 73 • 2014

Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Tae-Sun Yu, Hyun-Jung Kim, Tae‐Eog Lee

Citations: 61 • 2017

Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations

Tae-Sun Yu, Tae‐Eog Lee

Citations: 59 • 2017

Self-alignment of silicon chips on wafers: A capillary approach

Jean Berthier, Kenneth A. Brakke, François Grossi, L. Sanchez, L. Di Cioccio

Citations: 54 • 2010

Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

Fajun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou

Citations: 45 • 2014

Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down

QingHua Zhu, Yan Qiao, Naiqi Wu

Citations: 42 • 2019

Makespan Analysis of Lot Switching Period in Cluster Tools

Jun-Ho Lee, Hyun-Jung Kim

Citations: 40 • 2016

Heuristic algorithms for scheduling an automated wet-etch station

Swarnendu Bhushan, Iftekhar A. Karimi

Citations: 39 • 2003

The simulation of cluster tools: a new semiconductor manufacturing technology

H. Todd LeBaron, Matk Pool

Citations: 38 • 1994

Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules

Hyun-Jung Kim, Jun-Ho Lee

Citations: 38 • 2018