Dong-Hyun Roh

Samsung (South Korea), Korea Advanced Institute of Science and Technology

Papers

Total Citations

H-Index

About

Dong-Hyun Roh is a leading researcher in semiconductor manufacturing automation, with a primary focus on optimizing the operational efficiency and quality control of cluster tools. His work addresses a critical industry challenge: the wafer delay that occurs after processing, which can degrade wafer quality due to residual gases and heat. Roh’s major contributions include the development of **K-cyclic schedules** for dual-armed cluster tools, where he introduced novel concepts like the time difference σ and robot delay R to analyze and minimize worst-case wafer delays. His 2019 paper on this topic has garnered 26 citations, establishing a foundational framework for the field. Building on this, Roh pioneered the application of **Kanban feedback control** to regulate wafer delays in real time, a breakthrough detailed in his 2024 work (9 citations) that directly addresses quality variability in high-volume manufacturing. His research provides actionable solutions for the semiconductor industry, balancing throughput with stringent quality requirements. With a total of 38 citations across his key works, Roh’s analytical models and control strategies are essential reading for engineers and researchers seeking to enhance the reliability of automated wafer fabrication systems.