Chulhan Kim

Korea Advanced Institute of Science and Technology

Papers

Total Citations

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About

Chulhan Kim is a leading researcher in the modeling and control of automated manufacturing systems, with a specific focus on the high-stakes environment of semiconductor fabrication. His work addresses the critical challenge of "wafer residency time constraints"—the strict time limits for moving a processed wafer out of a chamber to prevent quality defects from residual heat and gases. Kim’s major contribution lies in applying feedback control theory to robotized cluster tools, moving beyond traditional scheduling heuristics to create dynamic, real-time control systems. His seminal 2015 paper, "Feedback Control of Cluster Tools for Regulating Wafer Delays," which has garnered 60 citations, provides a foundational framework for ensuring wafer quality by preventing time-out violations. Earlier work, including his 2012 paper on feedback control design (12 citations), established the theoretical basis for using discrete event system models like timed Petri nets to manage these complex systems. Kim has also advanced the field by developing decomposition approaches for scheduling in-line multiple cluster tools, a critical step for scaling production. His research directly impacts the efficiency and yield of modern chip manufacturing, making him a key figure in industrial automation.