Sunhee Baik

Carnegie Mellon University, Korea Advanced Institute of Science and Technology

Papers

Total Citations

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About

Sunhee Baik is a leading researcher in semiconductor manufacturing automation, with a primary focus on the scheduling and optimization of cluster tools—the robotic systems central to wafer fabrication. Her work addresses the complex challenge of coordinating multiple processing modules, transport robots, and loadlocks to maximize throughput and efficiency. Baik’s most-cited paper, “Scheduling In-Line Multiple Cluster Tools” (2015, 33 citations), introduces a decomposition approach that breaks down the scheduling of interconnected cluster tools into manageable subproblems, enabling practical solutions for real-world fabs. This work builds on her earlier foundational study (2012), which first formalized the in-line multiple cluster tool scheduling problem. By tackling the intricate coordination of wafer flows across linked tools, Baik has provided critical insights for improving productivity in semiconductor fabs, where even minor delays can have significant economic impact. Her research is essential reading for engineers and researchers working on automation, operations research, and the next generation of smart manufacturing systems.