Papers
4
Total Citations
98
H-Index
4
About
Dae-Kyu Kim is a leading researcher in the optimization of semiconductor manufacturing systems, with a primary focus on the scheduling and control of cluster tools. His work addresses the complex operational challenges of these automated platforms—used in processes like lithography, etching, and deposition—by developing optimal scheduling algorithms for both steady-state and transient cycles. Kim’s major contributions include pioneering methods for minimizing cycle times in single-armed and dual-armed cluster tools, as well as for sequentially connected multi-tool configurations with parallel chambers and single input/output modules. His most-cited paper, “Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers” (2015), has garnered 44 citations and is recognized for addressing a critical gap in transient-state scheduling, which is essential for real-world production ramps and changeovers. With additional influential works on dual-armed robots and linear cluster tools, Kim’s research has directly improved throughput and efficiency in wafer fabrication. His achievements are notable for bridging theoretical scheduling models with practical semiconductor industry constraints, making him a key figure in advancing automated manufacturing logistics.
Research Focus
Key Achievements
Top Papers
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- 3Optimal scheduling of transient cycles for single-armed cluster tools17 citations · 2013
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