Extreme ultraviolet

Top Researchers

Paul W. M. Blom

Institution: —

J. Beckers

Institution: —

Boy van Minderhout

Institution: —

G. M. W. Kroesen

Institution: —

Ton Peijnenburg

Institution: —

Jon Underwood

Institution: —

Long He

Institution: —

Stefan Wurm

Institution: —

Phil Seidel

Institution: —

Kevin J. Orvek

Institution: —

Particle contamination control by application of plasma

J. Beckers, Boy van Minderhout, Paul W. M. Blom, G. M. W. Kroesen, Ton Peijnenburg

Citations: 13 • 2020

Status of EUV reticle handling solution in meeting 32 nm HP EUV lithography

Long He, Stefan Wurm, Phil Seidel, Kevin J. Orvek, Ernie Betancourt, Jon Underwood

Citations: 5 • 2008

Particle protection capability of SEMI-compliant EUV-pod carriers

George Huang, Long He, John Lystad, Tom Kielbaso, Cecilia Montgomery, Frank Goodwin

Citations: 2 • 2010