Stefan Wurm
Papers
2
Total Citations
9
H-Index
2
About
No biography available yet.
Research Focus
Computer science2 · 9 citations
Engineering2 · 9 citations
Extreme ultraviolet lithography2 · 9 citations
Lithography2 · 9 citations
Optics2 · 9 citations
Physics2 · 9 citations
Reticle2 · 9 citations
Systems engineering2 · 9 citations
Materials science1 · 5 citations
Photolithography1 · 5 citations
Medicine1 · 5 citations
Extreme ultraviolet1 · 5 citations
Key Achievements
2
H-Index
2
Papers
9
Total Citations
5
Avg Citations/Paper
🏆 Most Cited Paper
Status of EUV reticle handling solution in meeting 32 nm HP EUV lithography
5 citations · 2008
📈 Most Prolific Year: 2008 (1 Papers)
🤝 Key Collaborators: 5
🏛 Institutions: Semtech (Canada)
Top Papers
- 1
- 2Status and path to a final EUVL reticle-handling solution4 citations · 2007
Key Collaborators
Not generated yet