Semtech (Canada)
🇨🇦 CA
Papers
1
Total Citations
5
H-Index
1
Researchers
6
About
No biography available yet.
Research Focus
Computer science1 · 5 citations
Engineering1 · 5 citations
Extreme ultraviolet1 · 5 citations
Extreme ultraviolet lithography1 · 5 citations
Interference lithography1 · 5 citations
Lithography1 · 5 citations
Materials science1 · 5 citations
Medicine1 · 5 citations
Nanotechnology1 · 5 citations
Optics1 · 5 citations
Key Achievements
1
H-Index
1
Papers
5
Total Citations
6
Faculty & Researchers
🏆 Most Cited Paper
Status of EUV reticle handling solution in meeting 32 nm HP EUV lithography
5 citations · 2008
📊 Avg Citations/Paper: 5
📈 Most Prolific Year: 2008 (1)
🔬 Research Focus: Computer science, Engineering, Extreme ultraviolet, Extreme ultraviolet lithography, Interference lithography, Lithography
Top Papers
- 1
Faculty & Researchers
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