Dennis L. Polla

University of Minnesota, Yale University

Papers

Total Citations

H-Index

About

Dennis L. Polla is a pioneering figure in the field of microelectromechanical systems (MEMS), with a particular focus on the micromachining of piezoelectric materials for robotics and sensor applications. His foundational work, including the highly cited 1992 paper "Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications," has shaped the development of miniaturized, high-performance devices that integrate sensing and actuation. Polla also made early, influential contributions to multifunctional silicon sensors, as demonstrated in his 1987 paper, which explored the compatible integration of piezoelectric and pyroelectric zinc oxide thin films with conventional MOS processing. This work laid the groundwork for simultaneous measurement of multiple physical and chemical variables on a single chip. Though his citation counts reflect the niche, foundational nature of his research, Polla’s contributions are widely recognized as critical to advancing MEMS technology, particularly in robotics and integrated sensor systems. His achievements continue to inspire researchers working at the intersection of materials science, microfabrication, and smart systems.