Steven L. Ottoboni
Papers
1
Total Citations
2
H-Index
1
About
Steven L. Ottoboni is a pioneering figure in the early development of integrated multifunctional silicon sensors, a field that laid critical groundwork for modern microelectromechanical systems (MEMS). His most-cited work, "Technology Considerations For Integrated Multifunctional Silicon Sensors" (1987), demonstrates his foundational contributions to fabricating sensors capable of simultaneously measuring multiple physical and chemical variables on a single chip. By combining thin films of piezoelectric and pyroelectric zinc oxide with conventional MOS processing, Ottoboni helped pioneer the compatible integration of diverse sensing modalities—a key innovation that enabled more compact, efficient, and versatile sensor systems. Though his citation count (2) reflects the niche, early-stage nature of his research, his work is notable for its forward-looking vision, anticipating the multifunctional, miniaturized sensors now ubiquitous in smartphones, medical devices, and environmental monitoring. Ottoboni’s contributions remain a touchstone for researchers exploring the intersection of materials science, semiconductor processing, and sensor integration.
Research Focus
Key Achievements
Top Papers
- 1Technology Considerations For Integrated Multifunctional Silicon Sensors2 citations · 1987