Surface micromachining

Microrobot Design Using Fiber Reinforced Composites

Robert J. Wood, S. Avadhanula, Ranjana Sahai, E. Steltz, Ronald S. Fearing

Citations: 389 • 2008

An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot

Bruce R. Donald, Christopher G. Levey, Craig D. McGray, Igor Paprotny, Daniela Rus

Citations: 338 • 2006

<scp>PZT</scp> ‐Based Piezoelectric <scp>MEMS</scp> Technology

Gabriel L. Smith, Jeffrey S. Pulskamp, Luz M. Sanchez, Daniel M. Potrepka, Robert M. Proie, Tony Ivanov, Ryan Q. Rudy, William D. Nothwang, Sarah S. Bedair, Christopher Meyer, Ronald G. Polcawich

Citations: 224 • 2012

An integrated flexible temperature and tactile sensing array using PI-copper films

Yao‐Joe Yang, Ming‐Yuan Cheng, Wen‐Yi Chang, L.C. Tsao, S.-A. Yang, Wen‐Pin Shih, Fu-Yu Chang, Shih-Chieh Chang, Kuang–Chao Fan

Citations: 164 • 2007

An integrated MEMS three-dimensional tactile sensor with large force range

Tao Mei, Wen J. Li, Ge Yu, Yong Chen, Lin Ni, Ming Ho Chan

Citations: 136 • 2000

A Review on Current Research Aspects in Tool-Based Micromachining Processes

S.P. Leo Kumar, J. Jerald, S. Kumanan, R. Prabakaran

Citations: 109 • 2014

Increasing the Dimensionality of Soft Microstructures through Injection‐Induced Self‐Folding

Tommaso Ranzani, Sheila Russo, Nicholas W. Bartlett, Michael Wehner, Robert J. Wood

Citations: 97 • 2018

Surface-micromachined components for articulated microrobots

Richard Yeh, E. Kruglick, Kristofer S. J. Pister

Citations: 97 • 1996

Omegabot : Biomimetic inchworm robot using SMA coil actuator and smart composite microstructures (SCM)

Je‐Sung Koh, Kyu‐Jin Cho

Citations: 96 • 2009

A silicon force sensor for robotics and medicine

David J. Beebe, Arthur S. Hsieh, Denice D. Denton, Robert G. Radwin

Citations: 88 • 1995

A Multiscale Assembly and Packaging System for Manufacturing of Complex Micro-Nano Devices

Aditya N. Das, Rakesh Murthy, Dan O. Popa, H.E. Stephanou

Citations: 82 • 2011

A 32 × 32 temperature and tactile sensing array using PI-copper films

Yao‐Joe Yang, Ming‐Yuan Cheng, Syuan-He Shih, X.-H. Huang, C.-M. Tsao, Fu-Yu Chang, Kuang–Chao Fan

Citations: 80 • 2009

An in-situ incremental microforming system for three-dimensional shell structures of foil materials

Yasunori Saotome, Takeshi Okamoto

Citations: 77 • 2001

A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems

Chang Liu, T. Tsao, Wenheng Liu, Peter Will, Chih‐Ming Ho

Citations: 66 • 2005

Omegabot: Crawling robot inspired by Ascotis Selenaria

Je‐Sung Koh, Kyu‐Jin Cho

Citations: 54 • 2010

Micromachining of an SU-8 flapping-wing flying micro-electro-mechanical system

Thomas Dargent, Xingliang Bao, Sébastien Grondel, G Le Brun, J Paquet, Caroline Soyer, Éric Cattan

Citations: 52 • 2009

The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle

Kun Meng, Weiping Zhang, Wenyuan Chen, Hongyi Li, Pengcheng Chi, Caijun Zou, Xiaosheng Wu, Feng Cui, Wu Liu, Jinge Chen

Citations: 51 • 2011

A cost-effective flexible MEMS technique for temperature sensing

Suyan Xiao, Lufeng Che, Xinxin Li, Yuelin Wang

Citations: 47 • 2007

A silicon-based flexible tactile sensor for ubiquitous robot companion applications

Kunnyun Kim, Kang Ryeol Lee, Dae Sung Lee, Nam-Kyu Cho, Won Hyo Kim, Kwang-Bum Park, Hyo-Derk Park, Yong Kook Kim, Yon-Kyu Park, Jong‐Ho Kim

Citations: 47 • 2006

An endoscopic capsule robot: a meso-scale engineering case study

Claudio Quaglia, Elisa Buselli, Robert J. Webster, Pietro Valdastri, Arianna Menciassi, Paolo Dario

Citations: 44 • 2009