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MANIPULATION

Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator

Ricardo Pérez, Nicolas Chaillet, K. Domański, P. Janus, P. Grabiec

Year
2006
Citations
36

Keywords

Wheatstone bridgePiezoresistive effectCantileverPiezoelectricityMicroelectromechanical systemsSiliconClampingFabricationStrain gaugeMaterials science

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