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Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator

Ricardo Pérez, Nicolas Chaillet, K. Domański, P. Janus, P. Grabiec

发表年份
2006
引用次数
36

关键词

Wheatstone bridgePiezoresistive effectCantileverPiezoelectricityMicroelectromechanical systemsSiliconClampingFabricationStrain gaugeMaterials science

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