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About

Yunbo He is a robotics and automation researcher whose work focuses on precision manipulation for semiconductor and microelectronics manufacturing. His primary research areas include wafer handling robotics, SCARA robot design and control, and advanced manufacturing processes such as MicroLED mass transfer and microstructure machining. He is best known for his contributions to the dynamic modeling and decoupling servo control of direct-drive SCARA robots for wafer handling, as demonstrated in his most-cited paper (32 citations), which presents a novel coordinated control method validated through simulation and experiment. He also developed a 3-PUU fast tool servo for complex microstructure machining (25 citations) and explored visual servoing for wafer and ceramic-substrate handling. His work on SCARA robot motion simulation and MicroLED mass transfer further underscores his focus on improving precision, stability, and repeatability in semiconductor fabrication. With over 70 combined citations, He’s research has practical implications for industrial automation, particularly in cleanroom environments where accuracy and reliability are critical. His achievements include advancing direct-drive robot architectures that eliminate traditional alignment stages, thereby increasing system flexibility and throughput.