Mitsutoshi Makihata
Papers
7
Total Citations
91
H-Index
5
About
Mitsutoshi Makihata is a leading researcher in MEMS (Micro-Electro-Mechanical Systems) and CMOS (Complementary Metal-Oxide-Semiconductor) integration, with a primary focus on developing advanced tactile sensor systems for robotics. His key contributions lie in creating high-density, network-based tactile sensors that function as artificial robot skin, enabling whole-body pressure sensing for improved safety and interaction. Makihata pioneered a novel integration and packaging technology using a thick BCB (benzocyclobutene) isolation layer and backside-grooved electrical connections, allowing MEMS-on-CMOS capacitive tactile sensors to be chip-size packaged and digitally interfaced. His most cited work (31 citations) details this packaging breakthrough for robot applications. He also developed a decentralized tactile sensor network system with interrupt-driven data transmission, capable of handling large sensor arrays—a crucial advancement for social and nursing robots. His 2018 paper on low-profile tactile sensors with digital interfaces (25 citations) further advanced whole-body robot skin. Makihata’s work bridges MEMS fabrication, LSI design, and system-level integration, establishing foundational technologies for sensitive, scalable, and intelligent robotic tactile sensing.
Research Focus
Key Achievements
Top Papers
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- 3Development of an LSI for Tactile Sensor Systems on the Whole-Body of Robots10 citations · 2011
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