Mitsutoshi Makihata

Tohoku University, University of California, Berkeley

Papers

7

Total Citations

91

H-Index

5

About

No biography available yet.

Research Focus

Engineering7 · 91 citations
Computer science7 · 91 citations
Electrical engineering7 · 91 citations
Tactile sensor7 · 91 citations
Capacitive sensing4 · 75 citations
Materials science5 · 72 citations
Wafer3 · 61 citations
Robot6 · 60 citations
Electronic engineering5 · 51 citations
Chip4 · 48 citations
Microelectromechanical systems4 · 47 citations
CMOS4 · 47 citations

Key Achievements

5
H-Index
7
Papers
91
Total Citations
13
Avg Citations/Paper
🏆 Most Cited Paper
Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection
31 citations · 2012
📈 Most Prolific Year: 2012 (2 Papers)
🤝 Key Collaborators: 15
🏛 Institutions: Tohoku University, University of California, Berkeley

Top Papers

  1. 1
    Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection
    31 citations · 2012
  2. 2
    Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin
    25 citations · 2018
  3. 3
    Development of an LSI for Tactile Sensor Systems on the Whole-Body of Robots
    10 citations · 2011
  4. 4
    LSI Design for Sensing Data Transmission by Interruption in Tactile Sensor Systems
    9 citations · 2009
  5. 5
    Tactile sensor network system with CMOS-MEMS integration for social robot applications
    9 citations · 2014
  6. 6
    Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection
    5 citations · 2011
  7. 7
    MEMS-CMOS Integrated Tactile Sensor with Digital Signal Processing for Robot Application
    2 citations · 2012

Key Collaborators

TNTakahiro Nakayama7 shared papersMMMasanori Muroyama7 shared papersYNYutaka Nonomura7 shared papersMEMasayoshi Esashi7 shared papersSTShuji Tanaka7 shared papersUYUi Yamaguchi6 shared papersMFMotohiro Fujiyoshi4 shared papersSMSakae Matsuzaki4 shared papersHYHitoshi Yamada3 shared papersKMKazuhiro Mima3 shared papersHYHiroyuki YAMADA3 shared papersHFHirofumi Funabashi1 shared papersTKTakahiro Kojima1 shared papersYNYoshihiro Nakano1 shared papersYHYoshiyuki Hata1 shared papers
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