Masanori Okuyama
Papers
4
Total Citations
108
H-Index
3
About
Masanori Okuyama is a pioneering researcher in the field of MEMS-based sensing technologies, with a particular focus on tactile sensors and miniature ultrasonic devices for robotic applications. His work centers on the design, fabrication, and characterization of microcantilever-based sensor arrays, leveraging advanced thin-film materials and micromachining techniques to push the boundaries of robotic perception. Okuyama's most influential contribution is his development of tactile sensor arrays utilizing nickel-chromium alloy thin films with exceptionally low temperature coefficients of resistance (TCR), a breakthrough that significantly reduces thermal noise and enhances measurement reliability. This work, which has garnered 86 citations, demonstrated robust slippage detection capabilities critical for dexterous robotic manipulation. His earlier research on inclined microcantilevers capable of measuring both normal and shear stresses further expanded the functional range of tactile sensing systems. Beyond tactile sensing, Okuyama has contributed to the miniaturization of ultrasonic sensors on silicon substrates using piezoelectric PZT thin films, enabling compact multimodal sensing platforms suited for intelligent robotic hands. Together, his body of work represents meaningful advances in sensor integration and fabrication, offering practical solutions for next-generation robotics requiring fine-grained environmental feedback.
Research Focus
Key Achievements
Top Papers
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- 3Miniature Ultrasonic and Tactile Sensors for Dexterous Robot5 citations · 2012
- 4