LIGA

Microfabricated Deposition Nozzles for Direct‐Write Assembly of Three‐Dimensional Periodic Structures

Rama B. Rao, Karen Lee Krafcik, Alfredo Morales, Jennifer A. Lewis

Citations: 111 • 2005

SensAct: The Soft and Squishy Tactile Sensor with Integrated Flexible Actuator

Oliver Ozioko, Prakash Karipoth, Pablo Escobedo, Markellos Ntagios, Abhilash Pullanchiyodan, Ravinder Dahiya

Citations: 89 • 2021

Visual servoing and CAD-driven microassembly

John T. Feddema, R.W. Simon

Citations: 55 • 1998

CAD-driven microassembly and visual servoing

John T. Feddema, R.W. Simon

Citations: 47 • 2002

A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique

H. M. Ashfiqul Hamid, Zeynep Çelik‐Butler

Citations: 30 • 2020

Micromotor assembly using high accurate optical vision feedback for microrobot relative 3D displacement in submicron range

Armin Sulzmann, J.‐M. Breguet, Jacques Jacot

Citations: 27 • 2002

<title>Microactuators as driving units for microbotic systems</title>

H. Lehr, Stefan Abel, J. Doepper, W. Ehrfeld, B. Hagemann, Klaus P. Kaemper, Frank I. Michel, Christian Schulz, C. Theurigen

Citations: 25 • 1996

Materials for LIGA products

W. Ehrfeld, Michaël Abraham, U. Ehrfeld, M. Lacher, H. Lehr

Citations: 20 • 2002

<title>Parallel assembly of high-aspect-ratio microstructures</title>

John T. Feddema, Todd R. Christenson

Citations: 17 • 1999

Mechatronic micro devices

Frank I. Michel, W. Ehrfeld

Citations: 16 • 2003

Superelastic compliant mechanisms for needlescopic surgical wrists

Wiktor Sieklicki, Matteo Zoppi, Rezia Molfino

Citations: 10 • 2009

<title>Experiments in micromanipulation and CAD-driven microassembly</title>

John T. Feddema, Chris G. Keller, Roger T. Howe

Citations: 4 • 1998

Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components

John T. Feddema, R.W. Simon, Marc A. Polosky, Todd R. Christenson

Citations: 4 • 1999

A Pipette Tip Integrated with a Capacitive Microsensor Fabricated by Combined 3D Printing and MEMS Process for Cell Detection and Transportation

Satoshi Amaya, Hirotaka Sugiura, Bilal Turan, Shingo Kaneko, Fumihito Arai

Citations: 3 • 2023

Three Key Technologies of Micro Systems

Zhang Weiyi

Citations: 2 • 2000