Ching-Chi Huang

Papers

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About

Ching-Chi Huang is a researcher specializing in atomic force microscopy (AFM) and its application to micro-electromechanical systems (MEMS) inspection. His work addresses a critical challenge in nanoscale metrology: precisely localizing the AFM tip when imaging large-scale samples. Huang’s major contributions include developing novel AFM tip localization methods that enable efficient, high-resolution 3D topography of MEMS devices. His most cited paper, “AFM Tip Localization and Efficient Scanning Method for MEMS Inspection” (2022), has garnered 9 citations, demonstrating its relevance in nanotechnology and semiconductor fields. In this work, he introduced a particle filter-based approach to overcome the difficulty of tip positioning without auxiliary sensors, significantly improving scanning accuracy and throughput. A related 2020 paper further refined these techniques, contributing to the broader goal of making AFM more practical for industrial MEMS characterization. Huang’s research bridges the gap between nanoscale resolution and macroscale sample sizes, offering solutions that benefit fields from bioscience to semiconductor manufacturing. His work is particularly valuable for students and researchers seeking to enhance AFM’s utility in real-world metrology applications.