Huang-Chih Chen

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About

Huang-Chih Chen is a researcher advancing the precision and efficiency of atomic force microscopy (AFM) for micro-electromechanical systems (MEMS) inspection. His work focuses on solving a critical challenge in nanotechnology: accurately localizing the AFM tip when scanning large-scale samples. Chen’s most cited paper, “AFM Tip Localization and Efficient Scanning Method for MEMS Inspection” (2022, 9 citations), introduces a novel approach to tip positioning that enhances scanning speed and reliability. His earlier work, “AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection” (2020, 2 citations), applies particle filter algorithms to track the tip’s location, enabling high-resolution 3D topography of MEMS devices without auxiliary sensors. These contributions are vital for semiconductor and bioscience applications, where nanoscale characterization is essential. By addressing the practical difficulties of AFM operation on large samples, Chen’s research bridges the gap between nanoscale resolution and real-world inspection needs, making him a notable figure in the field of MEMS metrology.