Improved design of large 3D micromirrors for microassembly into an optical MEMS cross-connect

摘要

A robotic-based microassembly process has been successfully applied to the construction of a novel micromirror design for use in optical switching. This paper is devoted to the description of a modified microassembly technique to construct a 3-D rotating inclined micromirror (3DRIM) that incorporate large micromirrors. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. The new modified assembly technique uses three supporting microparts: Two support posts and one cross-support post. Details of the assembly process to construct the micromirror and the design of the microparts are described. The results of the assembly process are presented, along with examples of prototype 3DRIMs. The 3DRIM is used as a building element for 1&times;<i>N</i> optical switching systems and for N &times;<i>M</i> optical cross-connects.