Automated microassembly

摘要

This chapter gives a general introduction to automated microassembly systems for MEMS packaging. Although any such system must use some forms of microscope optics and micromanipulators to automatically perform microassembly operations, the actual configuration of each system is highly dependent on the packaging and interconnection techniques implemented. This chapter focuses on the development of such systems by addressing their common design factors, functional units and supporting techniques from the perspective of robotic systems and automation.