Design of a Micro-Gripper and an Ultrasonic Manipulator for Handling Micron Sized Objects

摘要

This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research