Semiconductor device modeling

The simulation of cluster tools: a new semiconductor manufacturing technology

H. Todd LeBaron, Matk Pool

Citations: 38 • 1994

Analysis of circular cluster tools: Transient behavior and semiconductor equipment models

Young-Hun Ahn, James R. Morrison

Citations: 22 • 2010

The simulation of cluster tools: a new semiconductor manufacturing technology

H.T. LeBaron, M. Pool

Citations: 22 • 2005

Dynamic wafer handling process in semiconductor manufacturing

Heping Chen, B. W. Mooring, Harold P. Stern

Citations: 7 • 2011

Regular flow line models for semiconductor cluster tools: A case of lot dependent process times

James R. Morrison

Citations: 6 • 2009

Cycle time reduction at cluster tool in semiconductor wafer fabrication

Aye Swe, Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann

Citations: 4 • 2006

Equipment models for fab level proudction simulation: practical features and computational tractability

James R. Morrison

Citations: 4 • 2009

Error modeling and analysis in dynamic wafer handling

Hongtai Cheng, H. Chen, B. W. Mooring, Harold P. Stern

Citations: 2 • 2012

Industrial statistics applications in the semiconductor industry: some examples

Ron S. Kenett, Shelemyahu Zacks

Citations: 2 • 2012