Semiconductor device modeling
相关论文数: 9
顶级研究者
最高引用论文
The simulation of cluster tools: a new semiconductor manufacturing technology
H. Todd LeBaron, Matk Pool
引用数: 38 • 1994
Analysis of circular cluster tools: Transient behavior and semiconductor equipment models
Young-Hun Ahn, James R. Morrison
引用数: 22 • 2010
The simulation of cluster tools: a new semiconductor manufacturing technology
H.T. LeBaron, M. Pool
引用数: 22 • 2005
Dynamic wafer handling process in semiconductor manufacturing
Heping Chen, B. W. Mooring, Harold P. Stern
引用数: 7 • 2011
Regular flow line models for semiconductor cluster tools: A case of lot dependent process times
James R. Morrison
引用数: 6 • 2009
Cycle time reduction at cluster tool in semiconductor wafer fabrication
Aye Swe, Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann
引用数: 4 • 2006
Equipment models for fab level proudction simulation: practical features and computational tractability
James R. Morrison
引用数: 4 • 2009
Error modeling and analysis in dynamic wafer handling
Hongtai Cheng, H. Chen, B. W. Mooring, Harold P. Stern
引用数: 2 • 2012
Industrial statistics applications in the semiconductor industry: some examples
Ron S. Kenett, Shelemyahu Zacks
引用数: 2 • 2012