Cavity magnetron

Shape memory thin films formed with carrousel-type magnetron sputtering apparatus

Akira Ishida, Morio Sato, Osamu Tabata, W. Yoshikawa

Citations: 17 • 2005

Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

Akihiko Itoh, Toshiaki Makabe, N. Shimura, S. Tougo

Citations: 17 • 1996

Transparent Zinc Oxide Memristor Structures: Magnetron Sputtering of Thin Films, Resistive Switching Investigation, and Crossbar Array Fabrication

A. V. Saenko, R V Tominov, I L Jityaev, Zakhar Vakulov, V I Avilov, Nikita V. Polupanov, V. A. Smirnov

Citations: 11 • 2024

Plasma sputtering robotic device for <i>in-situ</i> thick coatings of long, small diameter vacuum tubes

A. Hershcovitch, M. Blaskiewicz, J.M. Brennan, Art Custer, Aaron Dingus, Mark Erickson, W. Fischer, Nader Jamshidi, R. Laping, C.J. Liaw, W. Meng, H. J. Poole, R. Todd

Citations: 4 • 2015