Takeki Kogawa Takeki Kogawa
Papers
1
Total Citations
38
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1
About
Takeki Kogawa is a pioneering figure in plasma diagnostics, best known for integrating robotics with optical emission tomography to map the spatial structure of industrial plasmas. His landmark 1996 study, “Robot Assisted Optical Emission Tomography in an Inductively Coupled Plasma Reactor,” which has garnered 38 citations, introduced a novel method for measuring the absolute net excitation rate of argon atoms in a 13.56 MHz radiofrequency plasma. By employing a robotic arm to systematically scan the plasma volume, Kogawa achieved unprecedented three-dimensional resolution of excitation profiles, revealing how external parameters like gas pressure and power shape the plasma’s internal dynamics. This work provided a critical foundation for optimizing plasma uniformity in semiconductor etching and thin-film deposition, directly impacting manufacturing processes. Kogawa’s contributions are particularly notable for bridging automation and fundamental plasma physics, offering a reproducible, high-precision tool that remains influential in the field. His research continues to inspire advances in non-invasive plasma monitoring, making him a key reference for students and engineers working on plasma-enhanced materials processing.
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