Max Robotics — Global Service Robot Directory + US Certification

About

S. Hollar is a pioneering researcher in the field of microrobotics and MEMS (Micro-Electro-Mechanical Systems), whose work has significantly advanced the development of ultrasmall, autonomous robotic systems. Best known for the landmark 2003 paper "Solar Powered 10 mg Silicon Robot," which has garnered 172 citations, Hollar demonstrated one of the world's first autonomous legged microrobots — a remarkable two-legged device measuring just 8.5 mm × 4 mm and weighing a mere 10 milligrams, fabricated using silicon-on-insulator technology. This achievement represented a major milestone in miniaturized robotics, proving that functional locomotion could be achieved at near-microscale dimensions using solar power alone. Hollar's broader research program focused on developing sophisticated microfabrication processes, including a five-mask planarized SOI process combining dual polysilicon structural layers with backside substrate etching, enabling three-dimensional hinged structures essential for robot leg motion. Additional contributions include bidirectional inchworm motors capable of producing equivalent forces in both directions, expanding the degrees of freedom available to microrobotic systems. Through hybridizing commercial CMOS electronics with custom in-house fabrication, Hollar helped establish a compelling framework for milligram-scale mobile robots that continues to inspire researchers working at the intersection of MEMS, robotics, and autonomous systems.