Minoru Noda

Papers

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About

Minoru Noda is a pioneering researcher in microelectromechanical systems (MEMS) and sensor technology, with a focus on tactile and ultrasonic sensing for robotics. His work centers on developing miniature, high-performance sensors that enable dexterous robotic manipulation. A key contribution is his 2007 paper on fabricating tactile sensors using inclined micro-cantilevers covered with elastomer, which can simultaneously detect normal and shear stresses—a critical capability for robots to handle objects with precision. This work has garnered 14 citations, reflecting its foundational role in tactile sensing. Noda also advanced ultrasonic sensing, as shown in his 2012 study on miniature ultrasonic and tactile sensors on silicon substrates. By integrating piezoelectric PZT thin films on diaphragms via micromachining, he created compact sensors that detect objects for dexterous robots. His research bridges materials science and robotics, offering practical solutions for improving robot-environment interaction. Noda’s contributions are notable for their focus on sensor miniaturization and multifunctionality, making him a key figure in the development of next-generation robotic tactile systems.