Entegris (United States)
🇺🇸 US
Papers
1
Total Citations
2
H-Index
1
Researchers
2
About
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Research Focus
Key Achievements
1
H-Index
1
Papers
2
Total Citations
2
Faculty & Researchers
🏆 Most Cited Paper
Particle protection capability of SEMI-compliant EUV-pod carriers
2 citations · 2010
📊 Avg Citations/Paper: 2
📈 Most Prolific Year: 2010 (1)
🔬 Research Focus: Engineering, Extreme ultraviolet, Extreme ultraviolet lithography, Laser, Materials science, Nuclear engineering
Top Papers
- 1Particle protection capability of SEMI-compliant EUV-pod carriers2 citations · 2010
Faculty & Researchers
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