Wafer-scale integration

Self-alignment of silicon chips on wafers: A capillary approach

Jean Berthier, Kenneth A. Brakke, François Grossi, L. Sanchez, L. Di Cioccio

引用数: 54 • 2010

Makespan Analysis of Lot Switching Period in Cluster Tools

Jun-Ho Lee, Hyun-Jung Kim

引用数: 40 • 2016

Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Tae-Sun Yu, Tae‐Eog Lee

引用数: 19 • 2019

Scheduling a Single-arm Robotic Cluster Tool with a Condition-based Cleaning Operation

HongPeng Li, QingHua Zhu, Yan Hou

引用数: 2 • 2022