Naiqi Wu

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研究焦点

主要成就

代表论文

1. 1
   A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

   230 次引用 · 2008
2. 2
   A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

   180 次引用 · 2009
3. 3
   Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes

   148 次引用 · 2010
4. 4
   Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology

   134 次引用 · 2016
5. 5
   Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

   123 次引用 · 2017
6. 6
   Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

   112 次引用 · 2016
7. 7
   Deadlock Resolution in Automated Manufacturing Systems With Robots

   110 次引用 · 2007
8. 8
   Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

   97 次引用 · 2017
9. 9
   Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

   83 次引用 · 2016
10. 10
    Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

    80 次引用 · 2013

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