Yan Qiao

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代表论文

1. 1
   Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

   123 次引用 · 2017
2. 2
   Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

   112 次引用 · 2016
3. 3
   Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

   97 次引用 · 2017
4. 4
   Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

   83 次引用 · 2016
5. 5
   Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

   80 次引用 · 2013
6. 6
   Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

   66 次引用 · 2014
7. 7
   Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools

   48 次引用 · 2020
8. 8
   Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

   45 次引用 · 2014
9. 9
   Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

   43 次引用 · 2016
10. 10
    Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down

    42 次引用 · 2019

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