Papers
14
Total Citations
384
H-Index
9
About
Fajun Yang is a leading figure in the optimization and scheduling of semiconductor manufacturing systems, with a primary focus on robotic cluster tools. His research addresses the critical challenge of maximizing wafer throughput while adhering to stringent wafer residency time constraints. Yang’s major contributions lie in developing sophisticated Petri net models to analyze and solve complex scheduling problems for hybrid multi-cluster tools—systems that combine both single-arm and dual-arm robots in treelike or linear topologies. His work is highly impactful, with his most-cited paper, "Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets" (2017), accumulating 97 citations. Another highly influential work, "Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation" (2016), has 83 citations and tackles the real-world issue of activity time variation. Yang’s research provides foundational methods for determining optimal, feasible schedules that prevent wafer quality issues, making him a key authority in the field of automated material handling and semiconductor fabrication.
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