Papers
3
Total Citations
215
H-Index
2
About
Dr. Nai Qi Wu is a leading authority in the modeling, analysis, and control of automated semiconductor manufacturing systems, with a particular focus on cluster tools. His research tackles the critical challenge of optimizing real-time operations in environments constrained by strict wafer residency time limits and variable activity durations. Dr. Wu’s most impactful contribution, a 2012 paper with 209 citations, introduces a Petri net-based framework to characterize the schedulability of dual-arm cluster tools, enabling the achievement of minimum cycle times despite these complex constraints. This foundational work provides the theoretical backbone for developing real-time control policies that prevent wafer residency violations—a key to yield and efficiency in integrated chip fabrication. Further extending his influence, Dr. Wu has pioneered the analysis of hybrid multi-cluster tools, which combine single and dual-arm robots, deriving optimal one-wafer cyclic schedules that coordinate robot access to shared buffers. His systematic approach to solving these intricate operational problems has established him as a key figure in semiconductor automation, offering both rigorous theory and practical solutions for high-performance manufacturing.
Research Focus
Key Achievements
Top Papers
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