Automated Assembly and Hermetic Packaging of MOEMS for Applications Requiring Extended Shelf-Lives

摘要

In this paper we describe two modular automated microassembly systems, along with a several packaging processes that have been integrated to produce reliable and cost-effective MOEMS devices. The automated and packaging systems consists of robotics such as pick and place, insertion and fastening, machine vision and controls, and processes such as die attach, solder reflow by laser, wire bonding and seam sealing. The target MOEMS devices are intended for applications requiring a minimum twenty year shelf-life.