Development of a Micro-Force/Moment Sensor Embedded Soft Fingertip and Its Experimental Verification by Compression Test

摘要

This paper introduces a high-performance tactile sensor capable of simultaneously measuring 1-axis force and 2-axes moments, which is produced by MEMS technology. We create a Tactile sensor Embedded Soft fingertip (TES) for the future application to robotic manipulation problems. We give the intimate explanation of the sensor during the fabrication process and the basic configuration of the total electric circuit. Finally, we demonstrate the effectiveness of the TES by performing its compression test, and verify that this sensor is applicable to the robotic handling and its feedback system.