谐振式微光学陀螺仪谐振微腔的最新进展

摘要

Resonant micro-optical gyros (RMOG) based on Sagnac effect has great potential in integration, miniaturization and sensitivity, which has broad application prospects in the fields of micro nano satellite attitude control, robot control, medical diagnosis and detection instruments, and has become a research hotspot in recent years. Resonant micro cavity as the core sensing element of resonator micro optical gyroscope, the optical characteristics of which are closely related to the performance of gyroscope system. The research progress of resonator has seriously restricted the development of RMOG. At present, integrated optical technology, micro nano optical processing technology and the application of new materials can reduce the weight and size of the resonator, reduce the cost and power consumption, and increase the reliability and performance index of the system. Combined with the information disclosed by periodical conference and related research institutions, the development status, basic principle and characteristic parameters of resonant micro optical gyroscope were briefly introduced. Various new structure designs of resonant micro cavity at home and abroad were listed, and the characteristics and potential of different structures were analyzed. In addition, the new materials for fabrication of resonant micro cavity at home and abroad were reviewed, and the optical properties of different materials were summarized. The future development direction and technical development path of resonator micro cavity for resonator micro optical gyroscope were preliminarily discussed.