OTHER
Design and Analysis of the Power Drive Module for Ultrahigh Vacuum Wafer-transfer Robot
H. C. Chen, Shuwei Huang
- 发表年份
- 2010
- 引用次数
- 3
关键词
WaferRobotTransfer (computing)Power (physics)Computer scienceMaximum power transfer theoremMechanical engineeringElectrical engineeringEngineeringMaterials science
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