OTHER
Design and Analysis of the Power Drive Module for Ultrahigh Vacuum Wafer-transfer Robot
H. C. Chen, Shuwei Huang
- Year
- 2010
- Citations
- 3
Keywords
WaferRobotTransfer (computing)Power (physics)Computer scienceMaximum power transfer theoremMechanical engineeringElectrical engineeringEngineeringMaterials science
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