<title>Design of micro robots with microgrippers for manipulation of micro-parts</title>

摘要

In this paper, a design of a micro-robot system with microgrippers for the purpose of manipulation of micro-parts is proposed. The methodology includes the integration of micro-actuators for micromanipulation tasks of requirements that will involve small size, low weight, high resolution, high linearity and high accuracy. The combination of micro-assembly stages and microgrippers with CNC technology will allow the fixing of a microgripper onto a CNC robot. In order to minimize the size of the microgripper, the structure is fabricated as a monolithic piece with elastic flexure hinges. The microgripper mechanism consists of flexure notch hinges and parallel movement of the gripping arms. These elements transmit the gripping force and gripping motion and realize a good mechanical advantage ratio. The compliant mechanism system of the microgrippers is analyzed using a theoretical pseudo-rigid-body model and flexural hinge equation to investigate and predict the displacement and force relationships between the inputs and the outputs. In addition, a finite element study is done on the mechanism model to compare with the theoretical results.