Microassembly of 3D micromirrors as building elements for optical MEMS switching

摘要

A robotic-based microassembly process has been successfully applied to the construction of a novel micro-mirror design for use in optical switching. This paper is devoted to the description of the microassembly process used to construct the 3D micro-mirror. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. Details of the assembly process include, the methodology to construct the micro-mirror, the design of the micro-mirror parts, and the design of the tools (microgrippers) that are mounted to the robot to handle the micro-parts. The results of the assembly process are presented, along with examples of prototype 3D micro-mirrors. The entire 3D micromirror consists of a novel electro-static rotary motor, onto which the 3D mirror structure is assembled. The 3D micro-mirror is used as a building element for 1 N optical switching systems and for N×M optical crossconnects.