Capacitive accelerometers for microelectromechanical applications: A review

摘要

The accelerometer based on MEMS is the fast developing device which finds its application in MEMS. It finds its applications in different fields namely automobile, consumer electronics, aeronautical, biomedical and robotics applications. In all these applications the device works based on the principle that the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams. The review article provides a past, present and future scope of the capacitive accelerometers in various fields.