Papers
4
Total Citations
31
H-Index
4
About
T. Akashi is a leading researcher in microelectromechanical systems (MEMS), specializing in high-performance silicon-on-insulator (SOI) accelerometers for automotive and robotic motion control. Their most significant contribution is the development of a fully-differential 3-axis accelerometer featuring a novel zigzag-shaped Z-electrode, which enables precise differential capacitance detection for improved sensitivity and stability. This foundational work, published in 2011, has garnered 14 citations and established a platform for subsequent innovations. Akashi further advanced the field by designing stress isolation suspensions using topology optimization methods, a 2022 study with 9 citations that addresses the critical issue of bias drift in self-positioning for autonomous driving. Their 2014 work on stress reduction structures, with 4 citations, demonstrates a systematic approach to mitigating thermal stress effects through FEM analysis, enhancing sensor output stability. Additionally, Akashi’s 2012 paper on chip-level warp control, also with 4 citations, refined the zigzag electrode design for reliable fabrication. Collectively, these contributions—totaling over 30 citations—showcase Akashi’s expertise in solving practical challenges of packaging-induced stress and temperature drift, making their accelerometers vital for precise inertial sensing in demanding environments.
Research Focus
Key Achievements
Top Papers
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- 3SOI 3-axis accelerometer with a stress reduction structure4 citations · 2014
- 4