Nobuhiko Nakano

Shibaura Institute of Technology, Keio University

Papers

Total Citations

118

H-Index

About

Nobuhiko Nakano is a leading figure in the field of low-temperature plasma diagnostics, with a particular focus on inductively coupled plasmas (ICPs). His research centers on the development of advanced, spatially resolved optical emission spectroscopy techniques to unravel the complex dynamics of non-equilibrium plasmas. Nakano’s major contributions include pioneering the use of robot-assisted optical tomography to capture three-dimensional distributions of excited species within ICP reactors, a method that provided unprecedented insight into plasma uniformity and production rates. His most cited work, “Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma” (1997, 52 citations), established a new standard for spatial plasma characterization. Building on this, his 1998 study on time-resolved emission in argon and oxygen (47 citations) offered critical data on excitation dynamics in collision-dominated regimes. Nakano’s meticulous diagnostics, including Abel-inverted radial profiles, have been instrumental in advancing the fundamental understanding of non-equilibrium plasmas, directly impacting the design and optimization of plasma processing technologies used in semiconductor manufacturing.