Masahiro Tadokoro

Papers

Total Citations

118

H-Index

About

Masahiro Tadokoro is a leading figure in the field of plasma diagnostics, with a specific focus on the fundamental physics of inductively coupled plasmas (ICPs). His research centers on the non-equilibrium behavior and spatial dynamics of these critical systems, which are widely used in semiconductor manufacturing. Tadokoro’s major contribution lies in pioneering the use of robot-assisted optical emission tomography to achieve unprecedented three-dimensional and time-resolved measurements of plasma species. His most cited work, "Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma" (1997, 52 citations), provided the first detailed maps of the net production rate of excited species in an argon ICP, revealing how pressure and power alter the plasma’s internal structure. This was complemented by his study on time-resolved spectroscopy (1998, 47 citations), which offered crucial insights into the excitation dynamics in both argon and oxygen plasmas. By developing sophisticated diagnostic techniques that move beyond simple line-of-sight averages, Tadokoro has enabled a deeper, more accurate understanding of plasma chemistry and transport, directly impacting the optimization of industrial plasma reactors.