PMUT

<scp>PZT</scp> ‐Based Piezoelectric <scp>MEMS</scp> Technology

Gabriel L. Smith, Jeffrey S. Pulskamp, Luz M. Sanchez, Daniel M. Potrepka, Robert M. Proie, Tony Ivanov, Ryan Q. Rudy, William D. Nothwang, Sarah S. Bedair, Christopher Meyer, Ronald G. Polcawich

Citations: 224 • 2012

Review on Piezoelectric Actuators Based on High-Performance Piezoelectric Materials

Haonan Jin, Xiangyu Gao, Kaile Ren, Jinfeng Liu, Liao Qiao, Mingzi Liu, Wei Chen, Yuhang He, Shuxiang Dong, Zhuo Xu, Fei Li

Citations: 220 • 2022

Piezoelectric Polymer Transducer Arrays for Flexible Tactile Sensors

Lucia Seminara, Luigi Pinna, Maurizio Valle, Laura Basiricò, Alberto Loi, Piero Cosseddu, Annalisa Bonfiglio, A. Ascia, Maurizio Biso, Alberto Ansaldo, D. Ricci, Giorgio Metta

Citations: 127 • 2013

Design and characterization of a PVDF ultrasonic range sensor

Antonino S. Fiorillo

Citations: 90 • 1992

Dual piezoelectric beam robot: The effect of piezoelectric patches’ positions

Hassan Hariri, Yves Bernard, Adel Razek

Citations: 46 • 2015

A review on 3D printed piezoelectric energy harvesters: Materials, 3D printing techniques, and applications

Amal Megdich, Mohamed Habibi, Luc Laperrière

Citations: 43 • 2023

Micromachined 1–3 composites for ultrasonic air transducers

M.I. Haller, B.T. Khuri-Yakub

Citations: 38 • 1994

Additive Processes for Piezoelectric Materials: Piezoelectric MEMS

Ronald G. Polcawich, Jeffrey S. Pulskamp

Citations: 34 • 2011

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

V. Carluccio, Luca Fachechi, Vincenzo Mastronardi, Lara Natta, Luciana Algieri, Gaia de Marzo, Francesco Rizzi, Massimo De Vittorio

Citations: 25 • 2023

An arbitrarily distributed tactile piezoelectric sensor array

Ping Li, Yumei Wen

Citations: 17 • 1998

Piezoelectric polymer transducer arrays for flexible tactile sensors

Lucia Seminara, Luigi Pinna, Maurizio Valle, Laura Basiricò, Alberto Loi, Piero Cosseddu, Annalisa Bonfiglio, A. Ascia, Maurizio Biso, Alberto Ansaldo, D. Ricci, Giorgio Metta

Citations: 16 • 2012

ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

Yuchao Zhang, Bin Miao, Guanghua Wang, Hongyu Zhou, Shiqin Zhang, Yimin Hu, Junfeng Wu, Xuechao Yu, Jiadong Li

Citations: 12 • 2023

Capacitive micromachined ultrasonic transducers for robotic sensing applications

G.G. Yaralioglu, A.S. Ergun, Yongli Huang, B.T. Khuri-Yakub

Citations: 11 • 2004

Analysis Sensing Voltage of lead zirconate titanate (PZT) Piezoelectric MEMS Gyroscope and comparing with Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

Sherif A. Ghamry, Ahmed K. Mahmoud, Roshdy A. Abdelrassoul, Iman Morsi

Citations: 10 • 2023

ScAlN PMUTs Based on Flexurally Suspended Membrane for Long-Range Detection

Shutao Yao, Wenling Shang, Guifeng Ta, Haojie Liu, Xiangyong Zhao, Jianhe Liu, Bin Miao, Jiadong Li

Citations: 10 • 2024

An arbitrarily distributed tactile sensor array using piezoelectric resonator

Ping Li

Citations: 9 • 2002

Piezoelectric Actuators and Their Applications

N. Suresh Kumar, R. Padma Suvarna, K. Chandra Babu Naidu, S. Ramesh, M.S.S.R.K.N. Sarma, H. Manjunatha, Ramyakrishna Pothu, Rajender Boddula

Citations: 9 • 2020

Architected Piezoelectric Metamaterial With Designable Full Nonzero Piezoelectric Coefficients

Bo Yu, Yingzhuo Lun, Zewei Hou, Jiawang Hong

Citations: 8 • 2023

Precision ultrasonic range sensor using one piezoelectric transducer with impedance matching and digital signal processing

Jan Kredba, Miroslav Holada

Citations: 8 • 2017

A Flexible Ultrasonic Sensor Based on Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)

Zhihao Tong, Zhipeng Wu, Songsong Zhang, Huicong Liu, Liang Lou

Citations: 5 • 2021